An efficient method for comprehensive modeling and parasitic extraction of cylindrical through-silicon vias in 3D ICs
 
姚蔷;叶佐昌;喻文健;

关键词:3D IC;through silicon via(TSV);parasitic
 
主要内容:To build an accurate electric model for through-silicon vias(TSVs) in 3D integrated circuits(ICs),a resistance and capac
 
《Journal of Semiconductors》  2015,36(08):154-160
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