| MIM capacitors with various Al_2O_3 thicknesses for GaAs RFIC application |
| 周佳辉;常虎东;刘洪刚;刘桂明;徐文俊;李琦;李思敏;何志毅;李海鸥; |
| 关键词：MIM capacitors;Al_2O_3;thickness |
| 主要内容：The impact of various thicknesses of Al_2O_3 metal-insulator-metal(MIM) capacitors on direct current and radio frequency |
| 《Journal of Semiconductors》 2015,36(05):41-44 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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