| A sub-μg MEMS oscillatingaccelerometer with read-out circuit in CMOS |
| 关键词：MEMS;g MEMS oscillatingaccelerometer wit |
| 主要内容：With the support by the National Natural Science Foundation of China and the Ministry of Science and Technology of China |
| 《Science Foundation in China》 2016,24(01):32 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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