| Heterogeneous integration of GaAs pHEMT and Si CMOS on the same chip |
| 吴立枢;赵岩;沈宏昌;张有涛;陈堂胜; |
| 关键词：Si CMOS;GaAs pHEMT;heterogeneous integra |
| 主要内容：In this work,we demonstrate the technology of wafer-scale transistor-level heterogeneous integration of Ga As pseudomorp |
| 《Chinese Physics B》 2016,25(06):498-503 |
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