| Looking into the future of Nanoelectronics in the Diversification Efficient Era |
| Simon DELEONIBUS; |
| 关键词：CMOS;thin films;heterogeneous integratio |
| 主要内容：The linear scaling of CMOS has encountered, since its beginning, many hurdles which request new process modules, driven |
| 《Science China(Information Sciences)》 2016,59(06):6-19 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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