| A new sensitivity model with blank space for layout optimization |
| Junping Wang;Yao Wu;Shigang Liu;Runsen X |
| 关键词：blank space;critical area;missing materi |
| 主要内容：As the technology scales advancing into the nanometer region,the concept of yield has become an increasingly important d |
| 《Journal of Semiconductors》 2017,38(06):106-112 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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