| Dependence of surface morphology of CVD diamond films on deposition conditions |
| YANGGuowei[1] MAOYude[2] |
| 关键词：化学气相沉积 介电薄膜 光薄膜 沉积条件 材料实验 |
| 主要内容：The diamond films have been deposited by the hot filament CVD method on molybdenum substrates from the mixture reactant gas of acetone and hy-drogen.The surface morphologies of the obtained diamond films under various de-position conditions have been observed by scanning electron microscope (SEM).The experimental results strongly indicate that the surface morphologies of the re-sulting films have closely related to the deposition conditions,i.e.,reaction pres-sure.For molybdenum substrates,under the lower reaction pressure the surface morphologies of the grains comprising the resulting films mainly display the small single crystal cubo-octahedron and double small crystal cubo-octahedron;under the higher reaction pressure ,the surface morphologies mainly display the large cauliflower-like .These results show that there are various crystal habits for CVD diamond under various deposition conditions . |
| 《半导体光子学与技术：英文版》 1995,1(1).-88-92 |
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