| AlN-based surface acoustic wave resonators on platinum bottom electrodes for high-temperature sensing applications |
| Chuan Li;Xing-Zhao Liu;Bin Pen |
| 关键词：AlN film;High temperature;Platinum;Temperature coe |
| 主要内容：Surface acoustic wave(SAW) resonators with Pt/AlN/Si and Pt/AlN/Pt/Si configurations were fabricated by lift-off photolithography techniques. High-tem |
| 《Rare Metals》 2016(5).408-411 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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