| Characteristics of the Structure and Properties of ZnSnO_3 Films by Varying the Magnetron Sputtering Parameters |
| Fa-Yu Wu;Jian-Wei Li;Yi Qi;Wu- |
| 关键词：ZnSnO3 film;Powder target;Magnetron sputtering;Opt |
| 主要内容：Transparent conductive oxide ZnSnO_3 films were prepared by radio-frequency magnetron sputtering from powder targets and were characterized by X-ray p |
| 《Acta Metallurgica Sinica(English Letters)》 2016(9).827-833 |
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