| Fabrication and characteristics of silicon-rich oxide thin films with controllable compositions |
| 张诗雨;潘泉均;方旭;毛克宁;叶辉; |
| 关键词：controllable;sputtering;magnetron;tuned;photoelect |
| 主要内容：Silicon-rich oxide films with controllable optical constants and properties are deposited by the reactive magnetron sputtering method on a Si target. |
| 《Chinese Optics Letters》 2016(5).77-81 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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