| Influence of crystal structure on friction coefficient of ZnO films prepared by atomic layer deposition |
| CHAI ZhiMin;LIU YuHong;LU XinC |
| 关键词：ZnO;atomic layer deposition;crystal structure;fric |
| 主要内容：In this work, the influence of crystal structure on the friction coefficient of zinc oxide(ZnO) films was studied. The ZnO films were deposited on a S |
| 《Science China(Technological Sciences)》 2016(3).506-512 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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