| Influence of Deposition Pressure on Properties of ZnO_Al Films Fabricated by RF Magnetron Sputtering |
| 刘超英;HE Feng;YAN Ningning;ZANG |
| 关键词：magnetron sputtering;Al-doped zinc oxide;argon pre |
| 主要内容：Transparent conductive aluminum doped zinc oxide(ZnO:Al,AZO) films were prepared on glass substrates by rf(radio frequency) magnetron sputtering from |
| 《JWUT(Materials Science)》 2016(6).1235-1239 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
微信公众号