| Influence of thickness on strain state and surface morphology of AlN grown by HVPE |
| 孙茂松;张纪才;黄俊;李雪威;王林军;刘雪华;王建峰;徐科; |
| 关键词：AIN;HVPE;surface morphology;strain state |
| 主要内容：A1N thick films were grown on c-plane sapphire substrates by hydride vapor phase epitaxy at high temperature.The evolution of the strain state and cry |
| 《Journal of Semiconductors》 2016(12).22-25 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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