| Rapidly Synthesis of Nanocrystalline Diamond Films by Helicon Wave Plasma |
| Jun Yu;Tianyuan Huang;Peiyu Ji |
| 关键词:Diamond;filed;roughness;bands;spectrometer;purity; |
| 主要内容:A new technique of the synthesis of Nanocrystalline Diamond(NCD)Films by helicon wave plasma(HWP)chemical vapor deposition at room temperature was rep |
| 《功能材料信息》 2016(2).40 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |