| Studying thin film damping in a micro-beam resonator based on non-classical theories |
| Mina Ghanbari;Siamak Hossainpo |
| 关键词：Thin film damping;micro-electromechanical systems( |
| 主要内容：In this paper, a mathematical model is presented for studying thin film damping of the surrounding fluid in an in-plane oscillating micro-beam resonat |
| 《Acta Mechanica Sinica》 2016(3).369-379 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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