| The optimization functions of ICP discharge in preparation of Cu–Zn–Sn precursors and CZTS films by co-evaporation |
| 李烨;陈俊芳;马俊辉;周丽芬; |
| 关键词：co-evaporation;plasma;precursors;Cu/(ZnCSn) |
| 主要内容：Cu-Zn-Sn(CZT) precursors were successfully prepared on glass substrate with the introduction of the assistant technology ICP(inductively coupled plasm |
| 《Journal of Semiconductors》 2016(2).32-36 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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