Thermal stability and separation characteristics of anti-sticking layers of Pt_Cr films for the hot slumping technique
 
马爽;闻铭武;王占山;

关键词:hot slumping technique;anti-sticking layers;Pt/Cr
 
主要内容:The thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films are studied in this paper. Several types of adhesion layer
 
《Chinese Physics C》  2016(7).172-178
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