| Laser CVD Process for the Preparation of Ultrafine SiC Powder |
| ZHANGQitu[1] XIAODifan[2] |
| 关键词：制备 超细粉末 非晶体 耐火材料 碳化硅 |
| 主要内容：The CW-CO2 laser driven gas reaction was applied to prepare nano-sized SiC powder,SiH4 and C2H4 of high purties,as starting materials,were mixed t a certain ration and introduced into the resaction cell.The gases flew across the laser beam orthogonally and thus were heated by laser beam.The nano-sized SiC ultrafine powderws were formed through thermic gas reation.The final productivity of this process was 97%,The obtained powders were characterized and analyzed.Chemical analysis revealed that the SiC content was 95.38 wt%,Oxygen ,the primary impurity,weighted 1.32% while trace impurities,such as calcium ,magnesium and other metals,were only 0.03%,XRD,XPS and TEM indicated that th powder particles were nearly spherical and not agglomerated.The particle size ranged from 10nm to 25nm with an average of 15 nm ,The particles tred to be noncrystalline. |
| 《中国耐火材料：英文版》 2000,9(4).-24-27 |
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