| Plasma properties of pulsed laser ablation of GaAs |
| ManBao－Yuan[1] WangXiang－Tai[2] 等 |
| 关键词：等离子体 脉冲激光 砷化镓 |
| 主要内容：Simultaneous time and space-resolved emission spectrum from a Nd:YAG laser-ablated plasma on a GaAs target has quantitative information on the generation and the propagation of species in the plasma at 1 atm or lower pressures.The experimental results show that the characteristics of the species in plasma are strongly influenced by the ambient pressure.The time-of-flight distributions of Ga atoms exhibit twin-peak structure,which can be explained by recombination process.The mean projected ranges of As^+ ions in the atmosphere of different densities were calculated according to Ziegler' theory model and the slowing down processes of them were simulated by using a Monte Carlo simulation program TRIM80,The calculatedc results are consistent with the experimental. |
| 《核技术：英文版》 1997,8(2).-98-102 |
| 全文下载请进入http://hightech.stlib.cn/tpi_1/sysasp/include/index.asp |
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