| Optical Noninvasive Diagnostic of Semiconductor Devices by Using Laser Beam Probe |
| JIANGJianping ZHOUMinkang 等 |
| 关键词：光学诊断 光学探测 光学系统 半导体装置 交光互作用 激光束探测 |
| 主要内容：The optical noninvasive diagnostic of characteristic of silicon semiconductor de-vices by using a InGaAsP/InP semiconductor laser as an optical probe is reported.The princi-ple of experimental method is based on the dependence of the optical refractive index on the carrier charge density in the active region of devices and detection of variation of refractive index by two laser beam interferometric techniques. |
| 《半导体光子学与技术：英文版》 1996,2(1).-66-71 |
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