| 用於使光学图像与扫描电子显微镜图像相关联之方法及系统 |
| TW103136063 2014-10-17 发明申请 |
| 2015-6-16 |
| 使光学图像与扫描电子显微镜(SEM)图像相关联包含：藉由运用一光学检验子系统扫描一样本来获取该样本之一全光学图像；储存该全光学图像；运用一额外来源识别存在於该全光学图像中之一所关注特徵之一位置；运用一SEM工具获取包含该经识别位置处之该特徵之该样本之一部分之一SEM图像；获取由该额外来源识别之该位置处之一光学图像部分，该等图像部分包含一参考结构；基於该所关注特徵及该参考结构在该等图像部分及该SEM图像两者中之存在而使该图像部分及该SEM图像相关联；及将该SEM图像中之该所关注特徵之一位置传送至该全光学图像之该图像部分之座标系统中以形成一经校正光学图像。 The correlation of optical images with SEM images includes acquiring a full optical image of a sample by scanning the sample with an optical inspection sub-system, storing the full optical image, identifying a location of a feature-of-interest present in the full optical image with an additional sources, acquiring an SEM image of a portion of the sample that includes the feature at the identified location with a SEM tool, acquiring an optical image portion at the location identified by the additional source, the image portions including a reference structure, correlating the image portion and the SEM image based on the presence of the feature-of-interest and the reference structure in both the image portions and the SEM image, and transferring a location of the feature-of-interest in the SEM image into the coordinate system of the image portion of the full optical image to form a corrected optical image. |
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