| 原子力显微镜系统及其决定边界点的扫描方法、扫描样本的方法 |
| TW102142894 2013-11-25 发明申请 |
| 2015-6-1 |
| 一种扫描一样本的方法，该方法包含下列步骤：以一第一弦波轨迹扫描该样本之一第一区域。自该第一弦波轨迹扫描该第一区域之一实际路径与该样本之关系，而获得一第一区域参数。以该第一区域参数预测扫描该样本之一第二区域之一第二弦波轨迹。以该第二弦波轨迹扫描该第二区域。 A method of scanning a sample comprises steps of : scanning a first region of the sample by a first sinusoid trajectory. Scanning relationship between a practical path of the first region and the sample to obtain a first region parameter. Predicting a second sinusoid trajectory of a second region of the sample by the first region parameter. Scanning the second region by the second sinusoid trajectory. |
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